DRIFT REDUCTION IN METALOXIDE GAS SENSORS

Authors
Citation
K. Steiner et G. Sulz, DRIFT REDUCTION IN METALOXIDE GAS SENSORS, TM. Technisches Messen, 62(1), 1995, pp. 27-30
Citations number
NO
Categorie Soggetti
Instument & Instrumentation
Journal title
ISSN journal
01718096
Volume
62
Issue
1
Year of publication
1995
Pages
27 - 30
Database
ISI
SICI code
0171-8096(1995)62:1<27:DRIMGS>2.0.ZU;2-P
Abstract
Ca-implantation is used to enhance SnO2-sensor signal stability. Ca do pants compensate conductivity reduction by oxygen diffusion into bulk oxygen vacancies at certain operating temperatures. Sensor signal drif ts are reduced significantly. A temperature control with calibration c ycles is proposed to run metaloxide sensor systems almost free of drif t.