SCANNING NEAR-FIELD OPTIC ATOMIC-FORCE MICROSCOPY

Design and performance of a scanning near-field optic/atomic-force mic roscope (SNOAM) is described in this paper. A sharpened and bent optic al fiber was used as a near-field optical probe as well as an atomicfo rce microscope probe in vertical vibrating mode. The SNOAM provided si multaneous topographical and optical imagings in several optical setti ng modes. Sub-micron levels of chromium patterns on a glass substrate were clearly observed by the SNOAM.