LOW-PRESSURE CHEMICAL-VAPOR-DEPOSITION OF INSB USING NEOPENTYLSTIBINEAND TRIMETHYLINDIUM

Authors
BU Y LIN MC BERRY AD HENDERSHOT DG
Citation
Y. Bu et al., LOW-PRESSURE CHEMICAL-VAPOR-DEPOSITION OF INSB USING NEOPENTYLSTIBINEAND TRIMETHYLINDIUM, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(2), 1995, pp. 230-236
Citations number
35
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
2
Year of publication
1995
Pages
230 - 236
Database
ISI
SICI code
0734-2101(1995)13:2<230:LCOIUN>2.0.ZU;2-C