PERMANENT-MAGNET ELECTRON-CYCLOTRON-RESONANCE PLASMA SOURCE WITH REMOTE WINDOW

Authors
BERRY LA GORBATKIN SM
Citation
La. Berry et Sm. Gorbatkin, PERMANENT-MAGNET ELECTRON-CYCLOTRON-RESONANCE PLASMA SOURCE WITH REMOTE WINDOW, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(2), 1995, pp. 343-348
Citations number
16
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
2
Year of publication
1995
Pages
343 - 348
Database
ISI
SICI code
0734-2101(1995)13:2<343:PEPSWR>2.0.ZU;2-O