STUDY OF THE PHOSPHINE PLASMA DECOMPOSITION AND ITS FORMATION BY ABLATION OF RED PHOSPHORUS IN HYDROGEN PLASMA

Authors
BRUNO G LOSURDO M CAPEZZUTO P
Citation
G. Bruno et al., STUDY OF THE PHOSPHINE PLASMA DECOMPOSITION AND ITS FORMATION BY ABLATION OF RED PHOSPHORUS IN HYDROGEN PLASMA, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(2), 1995, pp. 349-358
Citations number
28
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
2
Year of publication
1995
Pages
349 - 358
Database
ISI
SICI code
0734-2101(1995)13:2<349:SOTPPD>2.0.ZU;2-2