SUBSTRATE AMORPHIZATION INDUCED BY THE SPUTTER-DEPOSITION PROCESS - GEOMETRICAL ASPECTS

Authors
VALERI S ALTIERI S DIDOMENICO T VERUCCHI R
Citation
S. Valeri et al., SUBSTRATE AMORPHIZATION INDUCED BY THE SPUTTER-DEPOSITION PROCESS - GEOMETRICAL ASPECTS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(2), 1995, pp. 394-399
Citations number
37
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
2
Year of publication
1995
Pages
394 - 399
Database
ISI
SICI code
0734-2101(1995)13:2<394:SAIBTS>2.0.ZU;2-1