DEMONSTRATION OF NANOMETER RECORDING WITH A SCANNING PROBE MICROSCOPE

Authors
IMURA R KOYANAGI H MIYAMOTO M KIKUKAWA A SHINTANI T HOSAKA S
Citation
R. Imura et al., DEMONSTRATION OF NANOMETER RECORDING WITH A SCANNING PROBE MICROSCOPE, Microelectronic engineering, 27(1-4), 1995, pp. 105-108
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
27
Issue
1-4
Year of publication
1995
Pages
105 - 108
Database
ISI
SICI code
0167-9317(1995)27:1-4<105:DONRWA>2.0.ZU;2-4
Abstract
Feasibility of ultrahigh density information data storage has been new ly demonstrated by using an atomic force microscope (AFM). Ultrasmall gold dots ranging from 10 to 100 nm in diameter could be successfully recorded on Si substrate in air by adjusting an applied pulsed voltage of AFM probe (SiO2 birdbeak-type cantilever) coated with gold thin fi lm. It indicates that the technique has a potential to realize a stora ge density of more than 100 Gb/in2 and even 1 Tb/in2.