MEBES(R) 4500 RASTER SCAN TECHNIQUES - CALIBRATION AND CONTROL

Authors
PRIOR R BENVENISTE A NORTON K
Citation
R. Prior et al., MEBES(R) 4500 RASTER SCAN TECHNIQUES - CALIBRATION AND CONTROL, Microelectronic engineering, 27(1-4), 1995, pp. 147-150
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
27
Issue
1-4
Year of publication
1995
Pages
147 - 150
Database
ISI
SICI code
0167-9317(1995)27:1-4<147:M4RST->2.0.ZU;2-X
Abstract
A charge amplifier is used to achieve significant improvements in rast er scan signal measurement and control with the MEBES 4500 reticle wri ter. The technique is also used to locate mask registration marks prec isely beneath 0.6 mum resist material.