NONCONVENTIONAL TECHNIQUES FOR OPTICAL LITHOGRAPHY

Authors
DANDLIKER R GRAY S CLUBE F HERZIG HP VOLKEL R
Citation
R. Dandliker et al., NONCONVENTIONAL TECHNIQUES FOR OPTICAL LITHOGRAPHY, Microelectronic engineering, 27(1-4), 1995, pp. 205-211
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
27
Issue
1-4
Year of publication
1995
Pages
205 - 211
Database
ISI
SICI code
0167-9317(1995)27:1-4<205:NTFOL>2.0.ZU;2-X