PERFORMANCE OF PUPIL-FILTERING STEPPER-LENS SYSTEM

Authors
FUKUDA H KOBAYASHI Y TAWA T OKAZAKI S
Citation
H. Fukuda et al., PERFORMANCE OF PUPIL-FILTERING STEPPER-LENS SYSTEM, Microelectronic engineering, 27(1-4), 1995, pp. 213-216
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
27
Issue
1-4
Year of publication
1995
Pages
213 - 216
Database
ISI
SICI code
0167-9317(1995)27:1-4<213:POPSS>2.0.ZU;2-J
Abstract
Various types of pupil filters are applied to an i-line stepper lens, enhancing the depth of focus (DOF) for window, L/S, and isolated line patterns by about three times. This achieves a large DOF with a small optical proximity effect, and is also applicable to random patterns.