TRANSMISSION AND SIDE-LOBE EFFECT IN ATTENUATED PHASE-SHIFT MASKS

Authors
CUI Z",P,"PREWETT PD JOHNSON S
Citation
Pd. Cui Z",p,"prewett et S. Johnson, TRANSMISSION AND SIDE-LOBE EFFECT IN ATTENUATED PHASE-SHIFT MASKS, Microelectronic engineering, 27(1-4), 1995, pp. 259-262
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
27
Issue
1-4
Year of publication
1995
Pages
259 - 262
Database
ISI
SICI code
0167-9317(1995)27:1-4<259:TASEIA>2.0.ZU;2-L
Abstract
The performance of attenuated PSMs was characterised by light transmis sion and side-lobe effects for dense contacts, isolated contacts, line /space arrays and isolated lines. Log-intensity slope and depth of foc us for these features were compared at transmission up to 15%. The pri ntability of side-lobes was analysed and compared with i-line printed resist images.