FOCUSED-ION BEAM MODIFICATION OF WAVE-GUIDE PHOTONIC DEVICES

Authors
PATTERSON BD MUSIL C SIEGWART H VONLANTHEN A
Citation
Bd. Patterson et al., FOCUSED-ION BEAM MODIFICATION OF WAVE-GUIDE PHOTONIC DEVICES, Microelectronic engineering, 27(1-4), 1995, pp. 347-350
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
27
Issue
1-4
Year of publication
1995
Pages
347 - 350
Database
ISI
SICI code
0167-9317(1995)27:1-4<347:FBMOWP>2.0.ZU;2-R
Abstract
Localised depressions and 50-line grating structures have been milled into the active optical waveguides of GaInAsP/InP superluminescent dio des using a 30 keV focused Ga+ beam. These features produce distinct m odifications in the optical output spectra of the devices.