INTERCONNECTION LINES FOLLOWING THE SURFACE-TOPOGRAPHY FABRICATED BY WRITING FOCUSED ION-BEAM IMPLANTATION

Authors
BISCHOFF L TEICHERT J HESSE E
Citation
L. Bischoff et al., INTERCONNECTION LINES FOLLOWING THE SURFACE-TOPOGRAPHY FABRICATED BY WRITING FOCUSED ION-BEAM IMPLANTATION, Microelectronic engineering, 27(1-4), 1995, pp. 351-354
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
27
Issue
1-4
Year of publication
1995
Pages
351 - 354
Database
ISI
SICI code
0167-9317(1995)27:1-4<351:ILFTSF>2.0.ZU;2-N
Abstract
The Rossendorf Focused Ion Beam IMSA-100 was used for writing Co-impla ntation over a topographical structured surface with a partly controll ed focus. After a subsequent annealing the resulting CoSi2 interconnec tion lines were analysed by SEM and electrical measurements. Also the influence of the depth of focus on the height of the surface contours as well as the resulting radial beam profiles were investigated.