L. Bischoff et al., INTERCONNECTION LINES FOLLOWING THE SURFACE-TOPOGRAPHY FABRICATED BY WRITING FOCUSED ION-BEAM IMPLANTATION, Microelectronic engineering, 27(1-4), 1995, pp. 351-354
The Rossendorf Focused Ion Beam IMSA-100 was used for writing Co-impla
ntation over a topographical structured surface with a partly controll
ed focus. After a subsequent annealing the resulting CoSi2 interconnec
tion lines were analysed by SEM and electrical measurements. Also the
influence of the depth of focus on the height of the surface contours
as well as the resulting radial beam profiles were investigated.