SILICA FILMS PRODUCED BY PLASMA-ENHANCED CVD AND PYROLYSIS

Authors
DOMASHEVSKAYA EP MAKEEVA NN TEREKHOV VA BODNAR DM
Citation
Ep. Domashevskaya et al., SILICA FILMS PRODUCED BY PLASMA-ENHANCED CVD AND PYROLYSIS, Inorganic materials, 31(3), 1995, pp. 310-312
Citations number
3
Categorie Soggetti
Material Science
Journal title
Inorganic materials → ACNP
ISSN journal
00201685
Volume
31
Issue
3
Year of publication
1995
Pages
310 - 312
Database
ISI
SICI code
0020-1685(1995)31:3<310:SFPBPC>2.0.ZU;2-L