INVESTIGATION OF SURFACE-ROUGHNESS AND HILLOCK FORMATION ON PLATINIZED SUBSTRATES USED FOR PT PZT/PT CAPACITOR FABRICATION/

Authors
KNEER EA BIRNIE DP SCHRIMPF RD PODLESNY JC TEOWEE G
Citation
Ea. Kneer et al., INVESTIGATION OF SURFACE-ROUGHNESS AND HILLOCK FORMATION ON PLATINIZED SUBSTRATES USED FOR PT PZT/PT CAPACITOR FABRICATION/, Integrated ferroelectrics, 7(1-4), 1995, pp. 61-73
Citations number
7
Categorie Soggetti
Physics, Condensed Matter","Engineering, Eletrical & Electronic","Physics, Applied
Journal title
Integrated ferroelectrics → ACNP
ISSN journal
10584587
Volume
7
Issue
1-4
Year of publication
1995
Pages
61 - 73
Database
ISI
SICI code
1058-4587(1995)7:1-4<61:IOSAHF>2.0.ZU;2-0
Abstract
Hillock formation on Pt bottom electrode surfaces has been investigate d for <111> Si and sapphire substrates. This paper correlates the elec trical performance of Pt/PZT/Pt structured capacitors with the observe d surface roughness and/or hillock presence on the Pt bottom electrode .