CHARACTERIZATION OF PB(ZRXTI1-X)O-3 FILMS PREPARED BY VACUUM EVAPORATION METHOD

Authors
TOKUMITSU E UENO S NAKAMURA RI ISHIWARA H
Citation
E. Tokumitsu et al., CHARACTERIZATION OF PB(ZRXTI1-X)O-3 FILMS PREPARED BY VACUUM EVAPORATION METHOD, Integrated ferroelectrics, 7(1-4), 1995, pp. 215-223
Citations number
4
Categorie Soggetti
Physics, Condensed Matter","Engineering, Eletrical & Electronic","Physics, Applied
Journal title
Integrated ferroelectrics → ACNP
ISSN journal
10584587
Volume
7
Issue
1-4
Year of publication
1995
Pages
215 - 223
Database
ISI
SICI code
1058-4587(1995)7:1-4<215:COPFPB>2.0.ZU;2-E
Abstract
Pb(ZrxTi1-x)O-3 (PZT) thin films have been prepared on Pt/MgO substrat es by vacuum evaporation technique using PbO and ZrO2/TiO2 pellets as source materials. Good quality PZT can be obtained by employing Two-st ep evaporation method, where only PbO is evaporated at first before th e PZT evaporation. Remanent polarizations of 17-29 mu C/cm(2) and coer cive fields of 45-126 kV/cm are obtained.