Gl. Waytena et al., EFFECTS OF SUBSTRATE SMOOTHNESS ON THE MICROSTRUCTURE OF YBA2CU3O7-X Y2O3/YBA2CU3O7-X TRILAYERS/, Journal of electronic materials, 24(3), 1995, pp. 189-195
Transmission electron microscopy was used to analyze the microstructur
e of YBa2Cu3O7-x/Y2O3/YBa2Cu3O7-x trilayer structures deposited by off
-axis sputtering on MgO substrates with varying degrees of roughness.
Substrate surface hillocks with a peak-to-valley height of about 4.5 n
m were found to contribute to strain that extended through the film an
d disrupted the smoothness of the Y2O3 layer. In some cases, these hil
locks served as nucleation sites for yttria precipitates. Such defects
may seriously jeopardize the realization of weak-link Josephson junct
ions.