NONDESTRUCTIVE, ROOM-TEMPERATURE ANALYSIS QUALIFICATION OF WAFER-SIZED SEMICONDUCTOR-DEVICE STRUCTURES USING CONTACTLESS ELECTROMODULATION SPECTROSCOPY

This paper reviews the use of the contactless, and hence nondestructiv e, electromodulation methods of photoreflectance and contactless elect roreflectance for the room temperature characterization and qualificat ion of semiconductor device structures. These include heterojunction b ipolar transistors, pseudomorphic high electron mobility transistors, quantum well lasers, vertical cavity surface emitting lasers, multiple quantum well infrared detectors and solar cells.