M. Gotoda et al., SYMMETRICAL INP MIRROR FACETS FABRICATED BY SELECTIVE CHEMICAL BEAM EPITAXY ON REACTIVE-ION-ETCHED SIDEWALLS, Journal of crystal growth, 150(1-4), 1995, pp. 399-403
Vertical (0 $($) over bar$$ 11)-oriented parallel mirror facets as smo
oth as cleaved ones were obtained by selective chemical beam epitaxy (
CBE) on both sidewalls of [011]-direction ridges formed by reactive io
n etching (RIE) on a (100) InP substrate. The obtained vertical facets
often had a symmetric shape on the both sidewalls of the ridge, which
was required to use as Fabry-Perot mirrors in a semiconductor laser,
although an asymmetric shape had been often obtained before optimizing
the growth conditions. We clarified the cause of asymmetry using simu
lation of the flux distribution on the sidewalls of the ridge during g
rowth, and found the optimum growth conditions to obtain symmetric and
parallel mirror facets.