Mc. Holland et al., SILICON COMPENSATION AND SCATTERING MECHANISMS IN 2-DIMENSIONAL ELECTRON GASES ON (110)GAAS, Journal of crystal growth, 150(1-4), 1995, pp. 455-459
A study of the MBE growth of (001) and (110) (Al,Ga)As is reported, an
d the efficiency of Si as an n-type dopant in (11O)GaAs is accessed. A
40 nm spacer two-dimensional electron gas (2DEG) structure grown on (
11O)GaAs gives a mobility of 540,000 cm(2) V-1 s(-1) at 4 K after illu
mination. The dominant scattering mechanisms in 2DEGs on (110) and (00
1)GaAs grown under the separate optimum growth conditions for the two
orientations are compared.