Substrate misorientation effects on triple-period (TP) ordering in Al0
.48In0.52As were studied. When AlInAs was grown on a (001) InP substra
te misoriented by 4 degrees in the [($) over bar 1 ($) over bar 11]A d
irection, TP-type ordering formed more strongly in the [($) over bar 1
($) over bar 11]A direction than in the [111]A direction. This asymme
tric formation of TP-type ordering demonstrates that the step-arrays d
escending in the [($) over bar 1 ($) over bar 10] direction play an im
portant role in TP-type ordering formation in the [($) over bar 1 ($)
over bar 11]A direction. When AlInAs was grown at a higher temperature
on a (001) InP substrate misoriented by 4 degrees in the [($) over ba
r 1 ($) over bar 11]B direction, CuPt-type ordering was formed more st
rongly in the [($) over bar 111]B than in the [1 ($) over bar 11]B dir
ection. The importance of the [($) over bar 110] step in CuPt-type ord
ering, which is well established in GaInP systems, was thus reconfirme
d in this study on AlInAs.