MASS SPECTROSCOPIC STUDY FOR VAPORIZATION CHARACTERISTICS OF BA(TMHD)(2) AND SR(TMHD)(2) IN ELECTRON-CYCLOTRON RESONANCE-PLASMA ENHANCED METAL-ORGANIC CHEMICAL-VAPOR-DEPOSITION

The decomposition and the degradation characteristics of Ba(TMHD)(2) a nd Sr(TMHD)(2) with storage time were analyzed using differential scan ning calorimetry. Mass spectrometer monitoring of source vapors with A r and NH3 carrier gases in an electron cyclotron resonance-plasma enha nced metal organic chemical vapor deposition system was also performed . Introducing NH3 as a carrier gas, significantly improved the volatil ity and the thermal stability of the precursors, as well as the unifor mity and the surface smoothness of strontium carbonate films. Required vaporization temperatures of the precursors were lower with the intro duction of NH3 gas than with conventional Ar carrier gas. The degradat ion with the storage time and with oligmerization at the evaporation t emperature for Ba(TMHD)(2) was greater compared to Sr(TMHD)(2). (C) 19 97 American Vacuum Society.