INFLUENCE OF TESTER, TEST METHOD, AND DEVICE TYPE ON CDM ESD TESTING

In this paper, the charged device model (CDM) electrostatic discharge (ESD) events emulated by different commercial are studied, First, the characteristic waveforms, defined by the EOS/ESD CDM ESD draft standar d (DS5.3-1993) [1], are compared and some major problems related to th e specification of socketed CDM testers are discussed, Second, the res ults of an extensive CDM ESD test program are reported. The influences of various test parameters, such as the charging method (direct or fi eld), the discharge mode (contact or noncontact), the charge pin (subs trate pin or pin to be discharged) and the device package are studied, Finally, correlations of CDM ESD test results (the voltage thresholds and electrical failure signatures) are investigated.