ADVANCED CHARACTERIZATION - AN INDISPENSABLE TOOL FOR UNDERSTANDING ULTRA CLEAN PROCESSING

Authors
VANDERVORST W BENDER H STORM W HEYNS M POLLEUNIS C BERTRAND P
Citation
W. Vandervorst et al., ADVANCED CHARACTERIZATION - AN INDISPENSABLE TOOL FOR UNDERSTANDING ULTRA CLEAN PROCESSING, Microelectronic engineering, 28(1-4), 1995, pp. 27-34
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
28
Issue
1-4
Year of publication
1995
Pages
27 - 34
Database
ISI
SICI code
0167-9317(1995)28:1-4<27:AC-AIT>2.0.ZU;2-G
Abstract
Economical and environmental considerations have led to the replacemen t of Ultra Clean Processing by the ''Just-Clean-Enough'' concept which is based on a fundamental understanding of the effect of contaminants and consequently on defining tolerable limits for the contamination. In this paper an overview is given of the characterisation tools which can be used in this context for metal detection, surface chemistry an d roughening and organic contamination.