OPTIMIZATION OF HF LAST AND OXIDANT WET CLEANINGS FOR 7 NM GATE OXIDE

Authors
TARDIF F LARDIN T PAILLET C JOLY JP BENEYTON B
Citation
F. Tardif et al., OPTIMIZATION OF HF LAST AND OXIDANT WET CLEANINGS FOR 7 NM GATE OXIDE, Microelectronic engineering, 28(1-4), 1995, pp. 121-124
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
28
Issue
1-4
Year of publication
1995
Pages
121 - 124
Database
ISI
SICI code
0167-9317(1995)28:1-4<121:OOHLAO>2.0.ZU;2-V