OPTICAL WAVE-GUIDE BASED ON OXIDIZED POROUS SILICON

Authors
BONDARENKO VP DOROFEEV AM KAZUCHITS NM
Citation
Vp. Bondarenko et al., OPTICAL WAVE-GUIDE BASED ON OXIDIZED POROUS SILICON, Microelectronic engineering, 28(1-4), 1995, pp. 447-450
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
28
Issue
1-4
Year of publication
1995
Pages
447 - 450
Database
ISI
SICI code
0167-9317(1995)28:1-4<447:OWBOOP>2.0.ZU;2-9
Abstract
Optical waveguiding has been observed in oxidized porous silicon layer s. Main steps of integrated optical waveguide formation and experiment al results on lightguiding in the visible range are presented.