ELECTRONIC TRANSPORT-PROPERTIES OF LPCVD SEMIINSULATING POLYCRYSTALLINE SILICON (SIPOS)

Authors
AMOKRANE R LYNCH S MURTAGH M CREAN GM
Citation
R. Amokrane et al., ELECTRONIC TRANSPORT-PROPERTIES OF LPCVD SEMIINSULATING POLYCRYSTALLINE SILICON (SIPOS), Microelectronic engineering, 28(1-4), 1995, pp. 455-458
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
28
Issue
1-4
Year of publication
1995
Pages
455 - 458
Database
ISI
SICI code
0167-9317(1995)28:1-4<455:ETOLSP>2.0.ZU;2-J