Li-doping of ZnS/GaAs layers by means of molecular beam epitaxial (MBE
) growth using post-heated molecular beams is reported. Low-temperatur
e photoluminescence measurements and secondary ion mass spectrometry h
ave clarified that the Li atoms act as accepters and donor Ga is incor
porated from the substrate. It is also found that under higher doping
levels the growth rate is considerably reduced. Together with the refl
ection high-energy electron diffraction (RHEED) results, this behavior
is attributed to some interaction between Li and S atoms on the growi
ng surface.