Films of BaBiO3 (BBO), which is the matrix of the Ba-1-x K-x BiO3 (BKB
O) superconductor, have been grown by molecular beam epitaxy (MBE) usi
ng an oxygen radical beam source. Crystallization of BBO films with (1
10) orientation was successfully confirmed at the low temperature of 3
00 degrees C. According to the characterization for BBO films by X-ray
photoelectron spectroscopy (XPS), in spite of the BBO thin film being
synthesized at room temperature (RT), the film had the bismuth chemic
al state which is proper for both BBO and BKBO. This result indicates
that the oxygen radical beam source is a useful activated oxygen sourc
e for the deposition of superconducting oxide films.