Mc. Holland et al., THE EFFECT OF GROWTH TEMPERATURE, DELTA-DOPING AND BARRIER COMPOSITION ON MOBILITIES IN SHALLOW ALGAAS-GAAS 2-DIMENSIONAL ELECTRON GASES, Journal of crystal growth, 150(1-4), 1995, pp. 1215-1219
A series of two-dimensional electron gas (2DEG) structures have been g
rown with the 2DEG only 28 nm from the surface. The effects of growth
temperature and delta-doping density have been investigated, and a com
parison has been made between AlAs and Al0.3Ga0.7As barriers. A mobili
ty of 330,000 cm(2) V-1 s(-1) at 4 K has been measured for a shallow 2
DEG with an Al0.3Ga0.7As barrier, which is the highest reported for su
ch a structure.