C. Venkatraman et Gl. Liedl, ORIENTATION TEXTURE IN YBA2CU3O7-DELTA FILMS SYNTHESIZED FROM AMORPHOUS PRECURSORS, Journal of electronic materials, 23(11), 1994, pp. 1175-1182
The metalorganic decomposition technique was utilized in the fabricati
on of YBa2Cu3O7-delta films with preferred orientation on (100) MgO an
d (100) SrTiO3 substrates. The processing parameters such as film thic
kness, firing treatment, and substrate modifications were controlled t
o obtain a high degree of three-dimensional preferred growth in the fi
lms. Results indicate that three-dimensional film preferred growth dim
inishes with increasing film thickness. Preferential growth in YBa2Cu3
O7-delta films is enhanced with increasing firing temperature and redu
ced oxygen partial pressure due to enhanced atom mobility. Epitaxial g
rowth of YBa2Cu3O7-delta films has been achieved on both lattice misma
tched (MgO) and on lattice matched (SrTiO3) substrates. Epitaxial grow
th is promoted by lattice matched substrates at lower film firing temp
eratures. An attempt is made to understand the development of YBa2Cu3O
7-delta film preferential growth via the epitaxial grain growth mechan
ism.