NANOSPHERE LITHOGRAPHY - A MATERIALS GENERAL FABRICATION PROCESS FOR PERIODIC PARTICLE ARRAY SURFACES

Authors
HULTEEN JC VANDUYNE RP
Citation
Jc. Hulteen et Rp. Vanduyne, NANOSPHERE LITHOGRAPHY - A MATERIALS GENERAL FABRICATION PROCESS FOR PERIODIC PARTICLE ARRAY SURFACES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 1553-1558
Citations number
32
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
3
Year of publication
1995
Part
2
Pages
1553 - 1558
Database
ISI
SICI code
0734-2101(1995)13:3<1553:NL-AMG>2.0.ZU;2-K