ADAPTIVE EXTENSIONS TO A MULTIBRANCH RUN-TO-RUN CONTROLLER FOR PLASMA-ETCHING

Authors
MOYNE JR CHAUDHRY N TELFEYAN R
Citation
Jr. Moyne et al., ADAPTIVE EXTENSIONS TO A MULTIBRANCH RUN-TO-RUN CONTROLLER FOR PLASMA-ETCHING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 1787-1791
Citations number
12
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
3
Year of publication
1995
Part
2
Pages
1787 - 1791
Database
ISI
SICI code
0734-2101(1995)13:3<1787:AETAMR>2.0.ZU;2-D