REAL-TIME FEEDBACK FOR SIDEWALL PROFILE CONTROL IN REACTIVE ION ETCHING

Authors
RASHAP B FREUDENBERG J ELTA M
Citation
B. Rashap et al., REAL-TIME FEEDBACK FOR SIDEWALL PROFILE CONTROL IN REACTIVE ION ETCHING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 1792-1796
Citations number
12
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
3
Year of publication
1995
Part
2
Pages
1792 - 1796
Database
ISI
SICI code
0734-2101(1995)13:3<1792:RFFSPC>2.0.ZU;2-Y