A MODEL-BASED TECHNIQUE FOR REAL-TIME ESTIMATION OF ABSOLUTE FLUORINECONCENTRATION IN A CF4 AR PLASMA/

Authors
HANISH PD GRIZZLE JW GILES MD TERRY FL
Citation
Pd. Hanish et al., A MODEL-BASED TECHNIQUE FOR REAL-TIME ESTIMATION OF ABSOLUTE FLUORINECONCENTRATION IN A CF4 AR PLASMA/, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 1802-1807
Citations number
29
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
3
Year of publication
1995
Part
2
Pages
1802 - 1807
Database
ISI
SICI code
0734-2101(1995)13:3<1802:AMTFRE>2.0.ZU;2-#