FOURIER-TRANSFORM INFRARED STUDY OF RAPID THERMAL ANNEALING OF A-SI-N-H(D) FILMS PREPARED BY REMOTE PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION

Authors
LU Z SANTOS P STEVENS G WILLIAMS MJ LUCOVSKY G
Citation
Z. Lu et al., FOURIER-TRANSFORM INFRARED STUDY OF RAPID THERMAL ANNEALING OF A-SI-N-H(D) FILMS PREPARED BY REMOTE PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 607-613
Citations number
14
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
3
Year of publication
1995
Part
1
Pages
607 - 613
Database
ISI
SICI code
0734-2101(1995)13:3<607:FISORT>2.0.ZU;2-Y