ELLIPSOMETRY FOR III-V EPITAXIAL-GROWTH DIAGNOSTICS

Authors
MARACAS GN KUO CH ANAND S DROOPAD R SOHIE GRL LEVOLA T
Citation
Gn. Maracas et al., ELLIPSOMETRY FOR III-V EPITAXIAL-GROWTH DIAGNOSTICS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 727-732
Citations number
6
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
3
Year of publication
1995
Part
1
Pages
727 - 732
Database
ISI
SICI code
0734-2101(1995)13:3<727:EFIED>2.0.ZU;2-L