OXIDATION AND 6H-SIC-SIO2 INTERFACES

Authors
HORNETZ B MICHEL HJ HALBRITTER J
Citation
B. Hornetz et al., OXIDATION AND 6H-SIC-SIO2 INTERFACES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 767-771
Citations number
32
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
3
Year of publication
1995
Part
1
Pages
767 - 771
Database
ISI
SICI code
0734-2101(1995)13:3<767:OA6I>2.0.ZU;2-#