ANALYSIS OF THE OXYGEN CONTAMINATION PRESENT IN SINX FILMS DEPOSITED BY ELECTRON-CYCLOTRON-RESONANCE

Authors
GARCIA S MARTIN JM FERNANDEZ M MARTIL I GONZALEZDIAZ G
Citation
S. Garcia et al., ANALYSIS OF THE OXYGEN CONTAMINATION PRESENT IN SINX FILMS DEPOSITED BY ELECTRON-CYCLOTRON-RESONANCE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 826-830
Citations number
19
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
3
Year of publication
1995
Part
1
Pages
826 - 830
Database
ISI
SICI code
0734-2101(1995)13:3<826:AOTOCP>2.0.ZU;2-3