SYNERGISTIC SPUTTERING EFFECTS DURING ION-BOMBARDMENT WITH 2 ION SPECIES

Authors
BERG S KATARDJIEV IV
Citation
S. Berg et Iv. Katardjiev, SYNERGISTIC SPUTTERING EFFECTS DURING ION-BOMBARDMENT WITH 2 ION SPECIES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 831-833
Citations number
9
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
3
Year of publication
1995
Part
1
Pages
831 - 833
Database
ISI
SICI code
0734-2101(1995)13:3<831:SSEDIW>2.0.ZU;2-X