COMPOSITION OF THE OXYGEN PLASMAS FROM 2 INDUCTIVELY-COUPLED SOURCES

Authors
TUSZEWSKI M SCHEUER JT TOBIN JA
Citation
M. Tuszewski et al., COMPOSITION OF THE OXYGEN PLASMAS FROM 2 INDUCTIVELY-COUPLED SOURCES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 839-842
Citations number
17
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
3
Year of publication
1995
Part
1
Pages
839 - 842
Database
ISI
SICI code
0734-2101(1995)13:3<839:COTOPF>2.0.ZU;2-C