RADIO-FREQUENCY HOLLOW-CATHODE DISCHARGE FOR LARGE-AREA DOUBLE-SIDED FOIL PROCESSING

Authors
KORZEC D SCHOTT M ENGEMANN J
Citation
D. Korzec et al., RADIO-FREQUENCY HOLLOW-CATHODE DISCHARGE FOR LARGE-AREA DOUBLE-SIDED FOIL PROCESSING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 843-848
Citations number
48
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
3
Year of publication
1995
Part
1
Pages
843 - 848
Database
ISI
SICI code
0734-2101(1995)13:3<843:RHDFLD>2.0.ZU;2-0