LARGE-VOLUME ELECTRON-CYCLOTRON-RESONANCE PLASMA GENERATION BY USE OFTHE SLOTTED ANTENNA MICROWAVE SOURCE

Authors
ENGEMANN J SCHOTT M WERNER F KORZEC D
Citation
J. Engemann et al., LARGE-VOLUME ELECTRON-CYCLOTRON-RESONANCE PLASMA GENERATION BY USE OFTHE SLOTTED ANTENNA MICROWAVE SOURCE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 875-882
Citations number
60
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
3
Year of publication
1995
Part
1
Pages
875 - 882
Database
ISI
SICI code
0734-2101(1995)13:3<875:LEPGBU>2.0.ZU;2-M