EFFECT OF PLASMA OVERETCH OF POLYSILICON ON GATE OXIDE DAMAGE

Authors
GABRIEL CT MCVITTIE JP
Citation
Ct. Gabriel et Jp. Mcvittie, EFFECT OF PLASMA OVERETCH OF POLYSILICON ON GATE OXIDE DAMAGE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 900-904
Citations number
12
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
3
Year of publication
1995
Part
1
Pages
900 - 904
Database
ISI
SICI code
0734-2101(1995)13:3<900:EOPOOP>2.0.ZU;2-2