HYPERTHERMAL NEUTRAL BEAM ETCHING

Authors
GIAPIS KP MOORE TA MINTON TK
Citation
Kp. Giapis et al., HYPERTHERMAL NEUTRAL BEAM ETCHING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 959-965
Citations number
42
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
3
Year of publication
1995
Part
1
Pages
959 - 965
Database
ISI
SICI code
0734-2101(1995)13:3<959:HNBE>2.0.ZU;2-A