DEFECT PRODUCTION AND RECOMBINATION DURING LOW-ENERGY ION PROCESSING

Authors
KELLERMAN BK FLORO JA CHASON E BRICE DK PICRAUX ST WHITE JM
Citation
Bk. Kellerman et al., DEFECT PRODUCTION AND RECOMBINATION DURING LOW-ENERGY ION PROCESSING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 972-978
Citations number
20
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
3
Year of publication
1995
Part
1
Pages
972 - 978
Database
ISI
SICI code
0734-2101(1995)13:3<972:DPARDL>2.0.ZU;2-6