THE DESIGN, PERFORMANCE, AND APPLICATION OF AN ATOMIC-FORCE MICROSCOPE-BASED PROFILOMETER

Authors
MCEACHERN RL MOORE CE WALLACE RJ
Citation
Rl. Mceachern et al., THE DESIGN, PERFORMANCE, AND APPLICATION OF AN ATOMIC-FORCE MICROSCOPE-BASED PROFILOMETER, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 983-989
Citations number
9
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
3
Year of publication
1995
Part
1
Pages
983 - 989
Database
ISI
SICI code
0734-2101(1995)13:3<983:TDPAAO>2.0.ZU;2-F