Rj. Soave et al., A NOVEL TECHNIQUE FOR CHARACTERIZING THE SURFACE COVERAGE OF THIN-FILM CHEMICAL-VAPOR-DEPOSITION IN ULTRA-HIGH-ASPECT-RATIO MICROSTRUCTURES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 1027-1031
Citations number
9
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films