FABRICATION OF THIN-FILMS WITH HIGHLY POROUS MICROSTRUCTURES

Authors
ROBBIE K FRIEDRICH LJ DEW SK SMY T BRETT MJ
Citation
K. Robbie et al., FABRICATION OF THIN-FILMS WITH HIGHLY POROUS MICROSTRUCTURES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 1032-1035
Citations number
14
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
3
Year of publication
1995
Part
1
Pages
1032 - 1035
Database
ISI
SICI code
0734-2101(1995)13:3<1032:FOTWHP>2.0.ZU;2-O