RESIDUAL-STRESS IN METAL-ION IMPLANTED TITANIUM NITRIDE FILMS STUDIEDBY GLANCING INCIDENCE X-RAY-DIFFRACTION

Authors
PERRY AJ TREGLIO JR VALVODA V RAFAJA D
Citation
Aj. Perry et al., RESIDUAL-STRESS IN METAL-ION IMPLANTED TITANIUM NITRIDE FILMS STUDIEDBY GLANCING INCIDENCE X-RAY-DIFFRACTION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 1067-1072
Citations number
28
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
3
Year of publication
1995
Part
1
Pages
1067 - 1072
Database
ISI
SICI code
0734-2101(1995)13:3<1067:RIMITN>2.0.ZU;2-M